Spatiotemporal Variation of Light Emission from SF6 Parallel-Plate Discharge at Frequencies of 100 and 500 kHz
- 1 December 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (12A) , L2265
- https://doi.org/10.1143/jjap.28.l2265
Abstract
At a frequency of 500 kHz, the light emission from the discharge in SF6 gas at 0.2 Torr has been observed to be more intensive in front of an instantaneous anode than that from its negative glow. This result suggests that the plasma in the gap of two electrodes becomes an electron source for sustaining the discharge by the detachment of electrons from negative ions, and also that a relatively high electric field exists in front of the electrodes on both sides of the bulk plasma.Keywords
This publication has 3 references indexed in Scilit:
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- Diffuse and constricted glow discharges in SF6Journal of Physics D: Applied Physics, 1987
- Plasma diagnostics of a SF6radiofrequency discharge used for the etching of siliconJournal of Physics D: Applied Physics, 1986