Semi-Insulating Polycrystalline-Silicon (SIPOS) Passivation Technology

• 1 January 1976
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 15  (S1) , 35
• https://doi.org/10.7567/jjaps.15s1.35

Abstract

Keywords

• PASSIVATION TECHNOLOGY
• POLYCRYSTALLINE SILICON
• SIPOS
• SEMI INSULATING POLYCRYSTALLINE