A high average power excimer laser
- 1 January 1983
- proceedings article
- Published by AIP Publishing in AIP Conference Proceedings
- Vol. 100 (1) , 66-72
- https://doi.org/10.1063/1.34074
Abstract
An excimer laser developed at Los Alamos produces an ultraviolet (308 nm) output power of 200 W average at a repetition rate of 500 Hz. This electrical‐discharge‐pumped XeCl laser uses x‐ray preionization and acctive gas cleanup.Keywords
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