LWIR 128*128 GaAs/AlGaAs multiple quantum well hybrid focal plane array
- 1 May 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 38 (5) , 1124-1130
- https://doi.org/10.1109/16.78388
Abstract
The authors describe the fabrication and performance of a new type of hybrid focal plane array (FPA). The hybrid consists of a 128*128 GaAs/AlGaAs superlattice multiple-quantum-well detector array with peak response at 7.7 mu m mated to a high-performance CMOS readout with direct injection input. The quantum-well infrared photodetector (QWIP) array was fabricated by molecular-beam epitaxy (MBE). Optical gratings were excluded to facilitate evaluation of the basic detector-technology. The mean D* at 78 K was 5.76*10/sup 9/ cm- square root Hz/W. Total FPA 1/f noise was negligible, as corroborated by imagery having minimum resolvable temperature (MRT) of 30 mK at 0.07 cycles/mrad. No gain nonuniformity correction was used in the imaging demonstration.<>Keywords
This publication has 13 references indexed in Scilit:
- High-detectivity GaAs quantum well infrared detectors with peak responsivity at 8.2 μmJournal of Applied Physics, 1990
- Novel semiconductors and heterostructuresJournal of Vacuum Science & Technology A, 1990
- High sensitivity low dark current 10 μm GaAs quantum well infrared photodetectorsApplied Physics Letters, 1990
- Multiple quantum well 10 μm GaAs/AlxGa1−xAs infrared detector with improved responsivityApplied Physics Letters, 1987
- New 10 μm infrared detector using intersubband absorption in resonant tunneling GaAlAs superlatticesApplied Physics Letters, 1987
- New mode of IR detection using quantum wellsApplied Physics Letters, 1984
- Hybrid infrared focal-plane arraysIEEE Transactions on Electron Devices, 1982
- CCD Readout of infrared hybrid focal-plane arraysIEEE Transactions on Electron Devices, 1980
- Infrared Focal Planes in Intrinsic SemiconductorsIEEE Journal of Solid-State Circuits, 1978
- Buffered Direct Injection of Photocurrents into Charge-Coupled DevicesIEEE Journal of Solid-State Circuits, 1978