Ion-beam etching and sputtering of polytetrafluoroethylene (PTFE)
- 1 January 1974
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 20 (1) , S15-S19
- https://doi.org/10.1016/0040-6090(74)90052-2
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- R.F. sputtering of plasticsThin Solid Films, 1973
- Some characteristics of sputtered polytetrafluoroethylene filmsThin Solid Films, 1972
- Friction of sputtered PTFE filmsThin Solid Films, 1969