Thirty-centimeter-diameter ion milling source

• 1 March 1978
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 15  (2) , 277-280
• https://doi.org/10.1116/1.569570

Abstract

Keywords

• CENTIMETER
• THIRTY
• ION MILLING SOURCE
• DIAMETER ION MILLING