ZrO 2 film growth by chemical vapor deposition using zirconium tetra- tert- butoxide
- 1 July 1999
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 348 (1-2) , 90-98
- https://doi.org/10.1016/s0040-6090(99)00022-x
Abstract
No abstract availableKeywords
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