Stacking Faults in Vapor Grown Silicon

• 1 January 1963
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 110  (5) , 388
• https://doi.org/10.1149/1.2425771

Abstract

Keywords

• STACKING FAULTS
• VAPOR GROWN SILICON
• FAULTS IN VAPOR