Epitaxially stacked structures of Si/Al2O3/Si for sensor materials
- 28 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 267-270
- https://doi.org/10.1016/0924-4247(90)85052-6
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Heteroepitaxial Si/Al2O3/Si structuresApplied Physics Letters, 1989
- Epitaxial Al2O3 films on Si by low-pressure chemical vapor depositionApplied Physics Letters, 1988
- X-ray diffraction in γ-alumina whiskersJournal of Crystal Growth, 1987