Piezoelectric Actuator for Scanning Tunneling Microscopy
- 1 January 1985
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 24 (S3)
- https://doi.org/10.7567/jjaps.24s3.152
Abstract
A piezoelectric element possessing a function of three-dimensional actuation for scanning tunneling microscopy is proposed. The characteristics at low frequency are accurately measured by using Talystep. The piezoelectric element responds to small voltage signals with a high resolution of the order of 0.1 nm. The z-axis displacement accompanied by x- and y-axis actuations can be completely compensated by feedback of actuation signals. In order to confirm the actuation properties, specimen scanning in scanning electron microscope is successfully attemped by using the three-dimensional piezoelectric element in place of electron beam scanning by deflection coils.Keywords
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