Electrical transport properties of microcrystalline silicon thin films prepared by Cat-CVD
- 28 September 2001
- journal article
- conference paper
- Published by Elsevier in Thin Solid Films
- Vol. 395 (1-2) , 97-100
- https://doi.org/10.1016/s0040-6090(01)01218-4
Abstract
No abstract availableKeywords
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- Localized or Delocalized Electrons in Microcrystalline Silicon?MRS Proceedings, 1998
- Electrical properties of heavily doped μc-Si:HJournal of Applied Physics, 1995
- Photoelectric-Yield Studies of c-Si/a-Si:H InterfacesMRS Proceedings, 1995
- Electrical and structural properties of semi-insulating polycrystalline silicon thin filmsPhysical Review B, 1993