Microdefects in Nitrogen Doped FZ Silicon Revealed by Li+ Drifting

• 1 November 1995
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 196-201, 1761-1766
• https://doi.org/10.4028/www.scientific.net/msf.196-201.1761

Abstract

Keywords

• D DEFECTS
• FZ SILICON
• LI DRIFTING
• MICRODEFECTS
• NITROGEN DOPING