Sample rotating in Auger electron spectroscopy depth profiling

• 1 September 1987
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 5  (5) , 2979-2980
• https://doi.org/10.1116/1.574242

Abstract

Keywords

• SAMPLE ROTATING
• AUGER ELECTRON
• SPECTROSCOPY DEPTH
• DEPTH PROFILING
• ELECTRON SPECTROSCOPY