5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
- 1 March 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 73 (1-2) , 89-94
- https://doi.org/10.1016/s0924-4247(98)00259-3
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Atomic force microscopy using a piezoresistive cantileverPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Automated parallel high-speed atomic force microscopyApplied Physics Letters, 1998
- Independent parallel lithography using the atomic force microscopeJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Future trends in hard disk drivesIEEE Transactions on Magnetics, 1996
- High-density data storage using proximal probe techniquesIBM Journal of Research and Development, 1995
- Atomic force microscope lithography using amorphous silicon as a resist and advances in parallel operationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- Atomic resolution with an atomic force microscope using piezoresistive detectionApplied Physics Letters, 1993
- Piezoresistance Effect in Germanium and SiliconPhysical Review B, 1954