ION IMPLANTATION IN III–V SEMICONDUCTOR TECHNOLOGY

• 30 December 1993
• journal article
• review article
• Published by World Scientific Pub Co Pte Ltd in International Journal of Modern Physics B
• Vol. 07  (28) , 4687-4761
• https://doi.org/10.1142/s0217979293003814

Abstract

Keywords

• SEMICONDUCTOR DEVICES
• HETEROJUNCTION BIPOLAR TRANSISTOR
• ION IMPLANTATION