Pulse shape and laser-energy extraction from e-beam-pumped KrF

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Abstract
In this paper, detailed comparisons are made between the numerical predictions of a comprehensive KrF kinetics/laser‐model computer code and the experimental results from an e‐beam‐pumped KrF laser. The code and the experimental laser device are described. The inputs to the code are the measured temporally varying e‐beam energy and current density, the laser mixture, the optical‐cavity output coupling, and the optical gain length. Comparisons include laser output power, laser output pulse shape, and KrF* fluorescence from the laser‐cavity sidelight under lasing and nonlasing conditions. Using our numerical model, we have generated a scaling map for the KrF* laser.