Single- and multi-layer surface-micromachined platforms using electroplated sacrificial layers
- 29 October 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 35 (1) , 61-68
- https://doi.org/10.1016/0924-4247(92)87008-5
Abstract
No abstract availableKeywords
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