rf Sputtering of graphite in argon-oxygen mixtures
- 1 January 1976
- Vol. 26 (6) , 233-235
- https://doi.org/10.1016/s0042-207x(76)80482-4
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- The chemical sputtering of graphite in an oxygen plasmaVacuum, 1976
- Plasma cleaning of metal surfacesJournal of Vacuum Science and Technology, 1974