Focused Ion Beams

• 1 October 1991
• journal article
• Published by Springer Nature in Scientific American
• Vol. 265  (4) , 96-101
• https://doi.org/10.1038/scientificamerican1091-96

Abstract

Keywords

• ION BEAM
• LIQUID METAL
• METAL ION
• FOCUSED ION BEAM
• INTEGRATED CIRCUIT
• ELECTRIC FIELD