Silicon and silicon dioxideKx-ray spectra from hydrogen, helium, and oxygen bombardment

Silicon and silicon dioxide $K$ x-ray spectra produced by 0.8-MeV hydrogen, 3.2-MeV helium, and 13.0- and 35.0-MeV oxygen bombardment were measured with a high-resolution crystal spectrometer. The resulting $K\alpha$ and $K\beta$, diagram and satellite, chemical energy shifts observed with these ions and those from electron excitation are compared and discussed. In general, the chemical shifts obtained from the different projectiles are similar and are dependent upon the amount of additional $L$-shell ionization. However, the oxygen-produced $K\beta$ satellite shifts are anomalously large. The spectra indicate that perhaps these shifts are due to transitions from the conduction band of silicon dioxide.