Decomposition of gaseous dielectrics (CF4,SF6) by a non-equilibrium plasma. Mechanisms, kinetics, mass spectrometric studies and interactions with polymeric targets
- 1 January 1994
- journal article
- Published by Walter de Gruyter GmbH in Pure and Applied Chemistry
- Vol. 66 (6) , 1353-1362
- https://doi.org/10.1351/pac199466061353
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: