Stress-Induced Grain Growth in Thin Al-1%Si Layers on Si/SiO2 Substrates

• 10 May 1994
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 157-162, 1205-1210
• https://doi.org/10.4028/www.scientific.net/msf.157-162.1205

Abstract

Keywords

• AL-1%SI
• ELECTRON DIFFRACTION (ED)
• GRAIN GROWTH
• KIKUCHI PATTERNS
• LOCAL TEXTURE
• STRAIN
• STRESS
• TEM