A new technique for excitation of surface and shear acoustic waves on nonpiezoelectric materials

Abstract
An interdigital transducer deposited on a piezoelectric substrate has been used to excite SAW on nonpiezoelectric materials by using a fluid couplant. The piezoelectric substrate is held at an angle to the nonpiezoelectric material so as to match the tangential k vectors of the surface waves. Experiments have been carried out with a LiNbO3 piezoelectric substrate and a ceramic such as SiC or Si3N4 with a fluid couplant. At a center frequency of 100 MHz, the estimated conversion efficiency of the surface wave from the piezoelectric to the nonpiezoelectric material is −3.5 dB. The results compare favorably with a normal mode coupling theory we have developed which predicts −2.7 dB efficiency.

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