Study of the Ion Sputter-machining (1st Report)
- 1 January 1979
- journal article
- Published by Japan Society for Precision Engineering in Journal of the Japan Society of Precision Engineering
- Vol. 45 (531) , 292-298
- https://doi.org/10.2493/jjspe1933.45.292
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Ion etching for pattern delineationJournal of Vacuum Science and Technology, 1976