Influence Of Design Geometry And Packaging On The Response Of Thermal Cmos Flow Sensors
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 528-531
- https://doi.org/10.1109/sensor.1995.717275
Abstract
We report the fabrication and characterization of two different families of CMOS gas flow micro sensors. The sensors were produced with a commercial CMOS process followed by maskless post-processing. Within each family two design parameters were systematically varied. The sensors were characterized in flow channels with heights between 0.1 mm and 1.6 mm. Output characteristics of the devices such as their sensitivity, offset, temperature, and linear range were determined as a function of the design parameters and flow channel size, Conclusions for the optimization of thermal CMOS flow sensors are formulated.Keywords
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