Capacitive humidity sensors in SACMOS technology with moisture absorbing photosensitive polyimide
- 1 March 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 26 (1-3) , 509-512
- https://doi.org/10.1016/0924-4247(91)87041-z
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Silicon gas flow sensors using industrial CMOS and bipolar IC technologySensors and Actuators A: Physical, 1991
- Effects of aging on polyimide: a study of bulk and interface chemistryPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Gravimetric Measurements of Moisture Uptake in Polyimide Films Used in Integrated Circuit PackagingMRS Proceedings, 1989
- The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water SolutionsJournal of the Electrochemical Society, 1979