Fabrication of Three-Dimensional Microfluidic Systems by Soft Lithography
- 1 July 2001
- journal article
- research article
- Published by Springer Nature in MRS Bulletin
- Vol. 26 (7) , 523-528
- https://doi.org/10.1557/mrs2001.124
Abstract
No abstract availableThis publication has 26 references indexed in Scilit:
- An Introduction to Microelectromechanical Systems EngineeringMeasurement Science and Technology, 2002
- Fabrication of Topologically Complex Three-Dimensional Microstructures: Metallic MicroknotsJournal of the American Chemical Society, 2000
- Generation of Solution and Surface Gradients Using Microfluidic SystemsLangmuir, 2000
- Patterning Disorder in Monolayer Resists for the Fabrication of Sub-100-nm Structures in Silver, Gold, Silicon, and AluminumJournal of the American Chemical Society, 1999
- Using Elastomeric Membranes as Dry Resists and for Dry Lift-OffLangmuir, 1999
- Microfluidic Diffusion-Based Separation and DetectionScience, 1999
- Maskless photolithography: Embossed photoresist as its own optical elementApplied Physics Letters, 1998
- Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)Analytical Chemistry, 1998
- Microcontact printing and electroplating on curved substrates: Production of free‐standing three‐dimensional metallic microstructuresAdvanced Materials, 1997
- Using an elastomeric phase mask for sub-100 nm photolithography in the optical near fieldApplied Physics Letters, 1997