Surface micromachined structures fabricated with silicon fusion bonding
- 9 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
A surface micromachining technique has been developed which makes use of silicon fusion bonding. Many of the same types of micromechanical devices previously fabricated from polycrystalline have been fabricated from single-crystal silicon. Bridges and beams suspended near the substrate surface, complex thermally isolated designs, diaphragms suspended over shallow vacuum cavities, vertically and laterally resonant structures, fluid control devices, and fully released components have been created. It is concluded that this novel surface micromachining process is a powerful and versatile technology for a new generation of micromechanical inventions.<>Keywords
This publication has 4 references indexed in Scilit:
- Silicon fusion bonding for pressure sensorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Surface-micromachining processes for electrostatic microactuator fabricationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Miniature heart cell force transducer system implemented in MEMS technologyIEEE Transactions on Biomedical Engineering, 2001
- The mirror-matrix tube: A novel light valve for projection displaysIEEE Transactions on Electron Devices, 1975