Electron-Resist Fabrication of Bends and Couplers for Integrated Optical Circuits
- 1 April 1973
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 12 (4) , 729-736
- https://doi.org/10.1364/ao.12.000729
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 9 references indexed in Scilit:
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- MODES OF PROPAGATING LIGHT WAVES IN THIN DEPOSITED SEMICONDUCTOR FILMSApplied Physics Letters, 1969
- High-resolution Positive Resists for Electron-beam ExposureIBM Journal of Research and Development, 1968