Electrical field impact on the gas adsorptivity of thin metal oxide films
- 21 October 1998
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 73 (17) , 2524-2526
- https://doi.org/10.1063/1.122503
Abstract
A thin semiconducting NiO film is exposed to at room temperature. This exposure causes a work function change at the surface of the film due to adsorption of the molecules. It is found that there is a strong dependence of the adsorptivity, i.e., the amount of work function change per unit time, on the magnitude of an electrical field that is applied perpendicular to the film surface. This induced adsorptivity change is known as the electroadsorptive effect. In order to modulate the adsorptivity significantly, the electrical field strength must exceed This requirement can be achieved by using hybrid suspended gate field effect transistors with an air gap height below 1 μm.
Keywords
This publication has 5 references indexed in Scilit:
- Room temperature ozone sensing with KI layers integrated in HSGFET gas sensorsSensors and Actuators B: Chemical, 1998
- The EMOSFET as a potentiometric transducer in an oxygen sensorSensors and Actuators B: Chemical, 1998
- Thin (NiO)1−x(Al2O3)x, Al doped and Al coated NiO layers for gas detection with HSGFETSensors and Actuators B: Chemical, 1998
- Ozone-enhanced molecular beam deposition of nickel oxide (NiO) for sensor applicationsThin Solid Films, 1997
- Reliable hybrid GasFETs for work-function measurements with arbitrary materialsSensors and Actuators B: Chemical, 1994