Density of amorphous germanium films by spectroscopic ellipsometry

• 1 May 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (3) , 577-582
• https://doi.org/10.1116/1.573851

Abstract

Keywords

• MODELS
• STRUCTURAL
• AMORPHOUS
• SPECTROSCOPIC
• SPUTTERING
• FILM DENSITY
• EXTENSIVE SERIES