Performance Of A Layered Synthetic Microstructure Spectrogoniometer For Characteristic X-Ray Lines
- 1 November 1986
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 25 (11) , 251207-251207-
- https://doi.org/10.1117/12.7973983
Abstract
A spectrogoniometer designed to measure the quality of x-ray and XUV dispersive devices is described. The reflectivity of layered synthetic microstructures (LSMs) is presented at three wavelengths (13.3 A, 44.8 A, 67.7 A), corresponding to the emission lines of Cu, C, and B, respectively, emitted from a windowless x-ray tube. In particular, performance of Fabry-Perot etalons in the soft x-ray range is discussed. The observation of the Cu 2p emission spectrum obtained with an optimized LSM dispersor provides a specific example of LSM possibilities for x-ray spectroscopy.Keywords
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