A new automatic ellipsometer
- 30 June 1976
- journal article
- Published by Elsevier in Surface Science
- Vol. 56, 189-195
- https://doi.org/10.1016/0039-6028(76)90446-5
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Precision Bounds to Ellipsometer SystemsApplied Optics, 1975
- A high precision automatic ellipsometer using grating goniometersJournal of Physics E: Scientific Instruments, 1974
- A new type of precision ellipsometer without employing a compensatorOptics Communications, 1974
- A double-modulation photoelectric ellipsometerSurface Science, 1969
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963
- The Optical Constants of Several Metals in Vacuum*Journal of the Optical Society of America, 1936