Oxygen Surface-Density Measurements Based on Characteristic X-Ray Production by 100-keV Protons
- 1 November 1968
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 39 (12) , 5538-5541
- https://doi.org/10.1063/1.1656009
Abstract
The oxygen‐K x‐ray yield from known thicknesses of aluminum oxide (1–70 μg O/cm2), bombarded by 100‐keV protons, indicates that oxygen surface density may be measured over the range from 50 to 0.004 μg/cm2. At the lower limit, background is 50% of the signal. In thin oxide layers where proton energy loss and x‐ray absorption are negligible, the x‐ray yield I (x rays/proton) is related to the oxygen surface density t (μg/cm2) by I=(2.9×10−6)t.This publication has 6 references indexed in Scilit:
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