Impurity-concentration profile for an exponentially decaying diffusion coefficient in irradiation enhanced diffusion
- 15 January 1976
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 13 (2) , 477-478
- https://doi.org/10.1103/physrevb.13.477
Abstract
The diffusion equation is solved for a semi-infinite region in the case of irradiation-enhanced diffusion produced by a diffusion coefficient falling off exponentially in the medium. Near the surface the concentration profile due to enhanced diffusion has a larger concentration than the profile due to thermal diffusion; conversely far from the surface the enhanced-diffusion profile has a lower concentration than that due to thermal diffusion. Thus, this type of enhanced diffusion results in a more abruptly changing profile than does thermal diffusion.Keywords
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