Synthèse d'un film mince à base de h-BN par réaction du diborane avec un plasma d'azote dans la zone d'ionisation secondaire. Caractérisation de ce dépôt
- 1 August 1997
- journal article
- Published by Elsevier in Comptes Rendus de l'Académie des Sciences - Series IIB - Mechanics-Physics-Chemistry-Astronomy
- Vol. 325 (3) , 149-156
- https://doi.org/10.1016/s1251-8069(97)86830-3
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Spectroscopic analysis of the nitrogen short-lived afterglow induced at 433 MHzJournal of Physics D: Applied Physics, 1995
- Preparation and characterization of nanocrystalline cubic boron nitride by microwave plasma-enhanced chemical vapor depositionApplied Physics Letters, 1991
- Study of the formation and relaxation of N2(X1Σg+)ν in active nitrogen by pulsed multichannel Raman spectroscopyChemical Physics Letters, 1984
- Long contact effect between active nitrogen and carbon monoxide: N2 dissociation to N(4S)Journal of Quantitative Spectroscopy and Radiative Transfer, 1983