Ion Energy Distribution in Midium-Vacuum Arc Plasma for Processing the Titanium Nitride Film
Open Access
- 1 January 1991
- journal article
- Published by Institute of Electrical Engineers of Japan (IEE Japan) in IEEJ Transactions on Fundamentals and Materials
- Vol. 111 (12) , 1071-1076
- https://doi.org/10.1541/ieejfms1990.111.12_1071
Abstract
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