Quantitative analysis of oxygen in oxygen-doped polycrystalline silicon films with ion microanalyzer.
- 1 January 1982
- journal article
- Published by The Mass Spectrometry Society of Japan in Journal of the Mass Spectrometry Society of Japan
- Vol. 30 (2) , 163-167
- https://doi.org/10.5702/massspec.30.163
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