The CHIRP II High-power Excimer Laser

Abstract
The current performance of the high-average-power CHIRP II excimer laser is described. A power of 430 W at 1100 pulses per second has been achieved on the XeCl excimer. Particular reference is made to the undesirable high-pulse-repetition-frequency effects observed in the testbed CHIRP I laser, and successfully avoided in CHIRP II.

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