Surface morphology of chemical vapor deposition grown Ge on Ge substrates

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 2482-2491
• https://doi.org/10.1116/1.573715

Abstract

Keywords

• THIN FILM
• SCANNING ELECTRON MICROSCOPY
• CRYSTAL STRUCTURE
• MICROSTRUCTURES
• MOLECULAR BEAM EPITAXY