Study of the influence of Ar on the formation of diamond-like bonds in films obtained from CH4+Ar, RF plasma deposition
- 1 August 2001
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 289 (1) , 221-227
- https://doi.org/10.1016/s0022-3093(01)00713-x
Abstract
No abstract availableKeywords
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