Self-propagating room-temperature silicon wafer bonding in ultrahigh vacuum

• 11 December 1995
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 67  (24) , 3614-3616
• https://doi.org/10.1063/1.115335

Abstract

Keywords

• ROOM TEMPERATURE
• HEAT TREATMENT
• BOND STRENGTH
• SILICON WAFER