Beschichtung von dreidimensionalen Substraten mit einem magnetfeldunterstützten Mikrowellen‐Plasma bei Raumtemperatur
- 1 February 1991
- journal article
- research article
- Published by Wiley in Vakuum in Forschung und Praxis
- Vol. 3 (1) , 22-26
- https://doi.org/10.1002/vipr.2230030107
Abstract
No abstract availableKeywords
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