Measurements of carbon thin films using x-ray reflectivity
- 15 August 1989
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 66 (4) , 1861-1863
- https://doi.org/10.1063/1.344361
Abstract
We report x‐ray reflectivitymeasurements on ultrathin (∼250 Å) amorphous carbon films and show that for film thicknesses of a few hundred angstroms this is an extremely effective, accurate, and nondestructive technique for measuring the thickness, density, and microscopic surface roughness. These properties are difficult to accurately measure using other methods. However, since they affect the functional performance of these films and are dependent on preparation conditions, their determination is particularly important.This publication has 10 references indexed in Scilit:
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