Chemical Etching of InP by H 2 O 2 ‐ H 2 SO 4 ‐ H 2 O Solution

• 1 December 1979
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 126  (12) , 2269-2271
• https://doi.org/10.1149/1.2128942

Abstract