Deposition of Cubic Boron Nitride in Hydrogen Plasma

• 1 July 1998
• journal article
• Published by Wiley in Chemical Vapor Deposition
• Vol. 4  (4) , 125-129
• https://doi.org/10.1002/(sici)1521-3862(199807)04:04<125::aid-cvde125>3.3.co;2-q

Abstract

Keywords

• HYDROGEN PLASMA
• CUBIC BORON
• BORON NITRIDE
• DEPOSITION OF CUBIC