Extremely high electron mobilities in modulation-doped GaAs-Al x Ga 1− x As heterojunction superlattices

Abstract
GaAs-AlxGa1−xAs modulation doped multilayer structures with 77 K electron mobilities up to 80 300 cm2V−1s−1 at a carrier concentration of 6×1016 cm−3 have been grown by molecular beam epitaxy. Such high mobilities should make the performance of GaAs integrated logic circuits at liquid nitrogen temperature comparable to that of superconducting Josephson junctions.

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