Titanium Dioxide Antireflective Coating for Silicon Solar Cells by Spinning Technique

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Abstract
Optimum TiO2 antireflective (AR) films for silicon solar cells are obtained by coating the solution prepared from organotitanium compounds, acetylaceton as a ligand, and ethanol as a solvent on the silicon surface by spinning technique and then by firing them under a high temperature after baking. Using the same conditions for the heat treatment, the thickness of AR films can be controlled easily up to 1200 Å by changing solution concentration and spin speed. The optical properties of AR films, moreover, depend on the heat treatment conditions. Optimized AR films on silicon solar cells are obtained by coating an ethanol solution having a 4% equivalent TiO2 concentration on the silicon surface at a spin speed of 4000 rpm and by firing them at 80°C in the presence of oxygen after baking. The refractive index and thickness of AR films obtained under above coating are 2.4 and 620 Å, respectively. Silicon solar cells with these AR films show as much as a 50% improvement in conversion efficiency over uncoated cells.

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