Fluorinated Diamond Films, Slabs, and Grit

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Abstract
Diamond powders, single crystal diamonds (slabs and naturally occurring stones), and CVD diamond films have been fluorinated via direct fluorination and plasma techniques at a variety of temperatures and reaction times. Infrared, ESCA, and mass spectrometric studies verify that the diamond surfaces are altered by fluorination and that fluorine is attached to the surface to some degree in most instances. Based on spectra obtained using the FT-IR techniques of DRIFTS and ATR, the fluorine appears to have an effect on the diamond surfaces at relatively low temperatures in short reaction times by the removal of surface contaminants. A relatively high temperature (600ºC) or long reaction time at slightly lower temperatures is needed to attach a significant number of fluorine atoms onto the diamond surface. Once fluorinated, the diamonds show enhanced resistance to further oxidation. The outward appearance of the diamonds remains unchanged even at fluorination temperatures nearing 800ºC.

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