Deposition of Titanium Nitride on Heated Tungsten Filaments from the TiCl4-H2-N2 System
Open Access
- 5 July 1975
- journal article
- Published by The Electrochemical Society of Japan in Denki Kagaku oyobi Kogyo Butsuri Kagaku
- Vol. 43 (7) , 410-412
- https://doi.org/10.5796/kogyobutsurikagaku.43.410
Abstract
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